The Japan Society of Applied Physics

[P4-16] Effect of Nitrogen Annealing on the Electrical Properties of Ultrathin Crystalline γ-Al2O3 High-κ Dielectric Films Deposited on Si(111) Substrates

Mohammad Shahjahan, Takayuki Okada, Kazuaki Sawada, Makoto Ishida (1.Department of Electrical and Electronic Engineering, Toyohashi University of Technology)

https://doi.org/10.7567/SSDM.2003.P4-16