Electrical properties and conduction mechanism of ZrO2 films on Si1-yCy

G. K. Dalapati; S. K. Samanta; S. Chatterjee; P. K. Bose; S. Varma; Shivprasad Patil; C. K. Maiti

doi:https://doi.org/10.7567/SSDM.2003.P4-17

2003 International Conference on Solid State Devices and Materials

2003年9月16日〜 2003年9月18日
Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[P4-17] Electrical properties and conduction mechanism of ZrO2 films on Si1-yCy

G. K. Dalapati、S. K. Samanta、S. Chatterjee、P. K. Bose、S. Varma、Shivprasad Patil、C. K. Maiti (1.Department of Electronics & ECE、2.Department of Mechanical Engineering, Jadavpur University、3.Institute of Physics)

https://doi.org/10.7567/SSDM.2003.P4-17

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