Electrical properties and conduction mechanism of ZrO2 films on Si1-yCy

G. K. Dalapati; S. K. Samanta; S. Chatterjee; P. K. Bose; S. Varma; Shivprasad Patil; C. K. Maiti

doi:https://doi.org/10.7567/SSDM.2003.P4-17

2003 International Conference on Solid State Devices and Materials

Sep 16, 2003 - Sep 18, 2003
Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[P4-17] Electrical properties and conduction mechanism of ZrO2 films on Si1-yCy

G. K. Dalapati, S. K. Samanta, S. Chatterjee, P. K. Bose, S. Varma, Shivprasad Patil, C. K. Maiti (1.Department of Electronics & ECE, 2.Department of Mechanical Engineering, Jadavpur University, 3.Institute of Physics)

https://doi.org/10.7567/SSDM.2003.P4-17

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