[P4-2] Influence of Nitrogen Profile on Metal Workfunction in Mo/SiO2/Si MOS Structure

Masaki Hino、Takaaki Amada、Nobuhide Maeda、Kentaro Shibahara (1.Research Center for Nanodevices and Systems, Hiroshima University)

https://doi.org/10.7567/SSDM.2003.P4-2