The Japan Society of Applied Physics

2003 International Conference on Solid State Devices and Materials

2003 International Conference on Solid State Devices and Materials

Sep 16, 2003 - Sep 18, 2003
Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[P4-2] Influence of Nitrogen Profile on Metal Workfunction in Mo/SiO2/Si MOS Structure

Masaki Hino, Takaaki Amada, Nobuhide Maeda, Kentaro Shibahara (1.Research Center for Nanodevices and Systems, Hiroshima University)

https://doi.org/10.7567/SSDM.2003.P4-2