The Japan Society of Applied Physics

2003 International Conference on Solid State Devices and Materials

2003 International Conference on Solid State Devices and Materials

Sep 16, 2003 - Sep 18, 2003
Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[P5-8] GaAs-MISFETs with nm-Thin Gate Insulating Films Formed by Oxi-Nitridation Process

M. Takebe, N. C. Paul, K. Nakamura, K. Iiyama, S. Takamiya (1.Graduate School of Natural Science and Technology, Kanazawa University)

https://doi.org/10.7567/SSDM.2003.P5-8