[P9-7] Thermal conductivity of high-integrity nanometer buried oxides by SIMOX

Yemin Dong, Xiang Wang, Jing Chen, Meng Chen, Xi Wang, Ping He, Lilin Tian, Zhijian Li (1.Ion Beam Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 2.Shanghai Simgui Technology Co., Ltd., 3.Institute of Microelectronics, Tsinghua University)

https://doi.org/10.7567/SSDM.2003.P9-7