[A-1-4] Dopant Profile Design Methodology for 65 nm Generation via Inverse Modeling

Takuji Tanaka, Mitsuru Yamaji, Hiroyuki Kanata, Yukio Tagawa, Shigeo Satoh, Toshihiro Sugii (1.FUJITSU Ltd.)

https://doi.org/10.7567/SSDM.2004.A-1-4