[A-1-4] Dopant Profile Design Methodology for 65 nm Generation via Inverse Modeling

Takuji Tanaka、Mitsuru Yamaji、Hiroyuki Kanata、Yukio Tagawa、Shigeo Satoh、Toshihiro Sugii (1.FUJITSU Ltd.)

https://doi.org/10.7567/SSDM.2004.A-1-4