[A-2-5] Charge Trapping Characteristics of Hafnium Based High-κDielectrics with Various Metal Electrodes

Chadwin D. Young, Gennadi Bersuker, Huang-Chun Wen, George A. Brown, Prashant Majhi (1.International SEMATECH (ISMT), 2.Phillips Assignee)

https://doi.org/10.7567/SSDM.2004.A-2-5