The Japan Society of Applied Physics

[B-10-4] A Vertical SOI CMOS Technology with p-MOS on Si Film and n-MOS on Bulk Base

Shengdong Zhang, Xinnan Lin, Ruqi Han, Xusheng Wu, Mansun Chan (1.Institute of Microelectronics, Peking University, 2.The Hong Kong University of Science and Technology)

https://doi.org/10.7567/SSDM.2004.B-10-4