A Vertical SOI CMOS Technology with p-MOS on Si Film and n-MOS on Bulk Base

Shengdong Zhang; Xinnan Lin; Ruqi Han; Xusheng Wu; Mansun Chan

doi:https://doi.org/10.7567/SSDM.2004.B-10-4

2004 International Conference on Solid State Devices and Materials

Sep 14, 2004 - Sep 17, 2004
Tower Hall Funabori, Tokyo, Japan

[B-10-4] A Vertical SOI CMOS Technology with p-MOS on Si Film and n-MOS on Bulk Base

Shengdong Zhang, Xinnan Lin, Ruqi Han, Xusheng Wu, Mansun Chan (1.Institute of Microelectronics, Peking University, 2.The Hong Kong University of Science and Technology)

https://doi.org/10.7567/SSDM.2004.B-10-4

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