[B-2-5] A Metallurgical Prescription Suppressing Stress-induced Voiding (SIV) in Cu lines
Mari Abe、Naoya Furutake、Shinobu Saito、Naoya Inoue、Yoshihiro Hayashi
(1.System Devices Research Laboratories, NEC Corporation)
https://doi.org/10.7567/SSDM.2004.B-2-5
