[B-3-1] Integrating Diffusionless Anneals Into Advanced CMOS Technologies

R. Surdeanu, R. Lindsay, S. Severi, A. Satta, B.J. Pawlak, A. Lauwers, C.J.J. Dachs, K. Henson, S. McCoy, J.C. Gelpey, X. Pages (1.Philips Research Leuven, 2.IMEC, 3.Vortek Industries, 4.ASM International)

https://doi.org/10.7567/SSDM.2004.B-3-1