[B-3-1] Integrating Diffusionless Anneals Into Advanced CMOS Technologies

R. Surdeanu、R. Lindsay、S. Severi、A. Satta、B.J. Pawlak、A. Lauwers、C.J.J. Dachs、K. Henson、S. McCoy、J.C. Gelpey、X. Pages (1.Philips Research Leuven、2.IMEC、3.Vortek Industries、4.ASM International)

https://doi.org/10.7567/SSDM.2004.B-3-1