[B-6-4] Suppression of Gate Depletion in p+ Polysilicon Gated Sub-40nm PMOS Devices by Laser Thermal Process

T. Yamamoto, T. Kubo, K. Okabe, T. Sukegawa, Y. Wang, T. Lin, S. Talwar, M. Kase (1.Fujitsu Ltd., 2.Ultratech Inc.)

https://doi.org/10.7567/SSDM.2004.B-6-4