The Japan Society of Applied Physics

[C-4-4] Advantages of Ge (111) Surface for High Quality HfO2/Ge Interface

Masahiro Toyama, Koji Kita, Kentaro Kyuno, Akira Toriumi (1.Department of Materials Science, School of Engineering, The University of Tokyo)

https://doi.org/10.7567/SSDM.2004.C-4-4