[C-5-3] A 90nm-node SOI Technology for RF Applications

Tatsuhiko Ikeda, Yuuichi Hirano, Toshiaki Iwamatsu, Daniel Chen, Tsutomu Yoshimura, Takashi Ipposhi, Shigeto Maegawa, Masahide Inuishi, Yuzuru Ohji (1.Advanced Device Development Dept., Renesas Technology Corp., 2.High Frequency & Optical Semiconductor Division, Mitsubishi Electric Corporation)

https://doi.org/10.7567/SSDM.2004.C-5-3