[C-6-1] Suppression of Self-Heating in Hybrid Trench Isolated SOI MOSFETs with Poly-Si plug and W plug

Futoshi Komatsu, Toshiaki Iwamatsu, Yuuichi Hirano, Hiroyuki Takashino, Takashi Ipposhi, Shigeto Maegawa, Masahide Inuishi, Yuzuru Ohji (1.Renesas Semiconductor Engineering Corp., 2.Advanced Device Development Dept., Renesas Technology Corp.)

https://doi.org/10.7567/SSDM.2004.C-6-1