Suppression of Self-Heating in Hybrid Trench Isolated SOI MOSFETs with Poly-Si plug and W plug

Futoshi Komatsu; Toshiaki Iwamatsu; Yuuichi Hirano; Hiroyuki Takashino; Takashi Ipposhi; Shigeto Maegawa; Masahide Inuishi; Yuzuru Ohji

doi:https://doi.org/10.7567/SSDM.2004.C-6-1

[C-6-1] Suppression of Self-Heating in Hybrid Trench Isolated SOI MOSFETs with Poly-Si plug and W plug

Futoshi Komatsu、Toshiaki Iwamatsu、Yuuichi Hirano、Hiroyuki Takashino、Takashi Ipposhi、Shigeto Maegawa、Masahide Inuishi、Yuzuru Ohji (1.Renesas Semiconductor Engineering Corp.、2.Advanced Device Development Dept., Renesas Technology Corp.)

https://doi.org/10.7567/SSDM.2004.C-6-1

2004 International Conference on Solid State Devices and Materials

[C-6-1] Suppression of Self-Heating in Hybrid Trench Isolated SOI MOSFETs with Poly-Si plug and W plug