[D-1-3] Fabrication and Characterization of 1k-bit 1T2C-Type Ferroelectric Memory Cell Array

Hyun-Soo Kim, Shuu’ichirou Yamamoto, Toru Ishikawa, Hiroshi Ishiwara (1.Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, 2.R&D Association for Future Electron Devices)

https://doi.org/10.7567/SSDM.2004.D-1-3