[D-3-3] GST Confined Structure and Integration of 64Mb PRAM

F. Yeung, S.J. Ahn, Y.N. Hwang, C.W. Jeong, Y.J. Song, S.Y. Lee, S.H. Lee, K.C. Ryoo, J.H. Park, J.M. Shin, E.Y. Lee, W.C. Jeong, Y.T. Kim, K.H. Koh, G.T. Jeong, H.S. Jeong, K.N. Kim (1.Advanced Technology Development, 2.CAE Team, Semiconductor R&D Centre, Samsung Electronics Co. Ltd)

https://doi.org/10.7567/SSDM.2004.D-3-3