[D-4-2] A Highly Scalable Split-Gate SONOS Flash Memory with Programmable-Pass and Pure-Select Transistors for Sub-90-nm Technology

Yong Kyu Lee, Byung Yong Choi, Jae Sung Sim, Ki Whan Song, Jong Duk Lee, Byung-Gook Park, Donggun Park, Chilhee Chung (1.Inter-university Semiconductor Research Center and School of Electrical Engineering, Seoul National University, 2.C&M, System LSI and, 3.Device Research Team, R&D Center, Samsung Electronics Co.)

https://doi.org/10.7567/SSDM.2004.D-4-2