Epitaxial Growth of β-FeSi2 on Single Crystal Insulator

Kensuke Akiyama; Satoru Kaneko; Hiroshi Funakubo

doi:https://doi.org/10.7567/SSDM.2004.D-9-4

2004 International Conference on Solid State Devices and Materials

Sep 14, 2004 - Sep 17, 2004
Tower Hall Funabori, Tokyo, Japan

[D-9-4] Epitaxial Growth of β-FeSi2 on Single Crystal Insulator

Kensuke Akiyama, Satoru Kaneko, Hiroshi Funakubo (1.Kanagawa Industrial Technology Research Institute, 2.Department of Innovative and Engineered Materials, Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.2004.D-9-4

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