[E-2-3] Breakdown Mechanisms and Lifetime Prediction for 90nm-node Low-power HfSiON/SiO2 CMOSFETs

Masayuki Terai, Yuko Yabe, Hirohito Watanabe, Shinji Fujieda, Ayuka Morioka, Setsu Kotsuji, Toshiyuki Iwamoto, Motofumi Saitoh, Takashi Ogura, Yukishige Saito (1.System Devices Research Laboratories, NEC Corp.)

https://doi.org/10.7567/SSDM.2004.E-2-3