[F-2-3] InGaP/InGaAs DCFETs with Drain and Source Recess Process

Feng-Tso Chien、Jin-Mu Yin、Shin-Tzung Su、Ming-Hung Lai、Kou-Way Tu、Ching-Ling Cheng (1.Dept. of Electronic Engineering, Feng Chia University、2.R&D Dept., Chino-Excel Technology Corp.)

https://doi.org/10.7567/SSDM.2004.F-2-3