[F-2-3] InGaP/InGaAs DCFETs with Drain and Source Recess Process

Feng-Tso Chien, Jin-Mu Yin, Shin-Tzung Su, Ming-Hung Lai, Kou-Way Tu, Ching-Ling Cheng (1.Dept. of Electronic Engineering, Feng Chia University, 2.R&D Dept., Chino-Excel Technology Corp.)

https://doi.org/10.7567/SSDM.2004.F-2-3