The Japan Society of Applied Physics

[F-3-2] Application of High Reliable Silicon Thru-Via to Image Sensor CSP

Kojiro Kameyama、Yoshio Okayama、Mitsuo Umemoto、Akira Suzuki、Hiroshi Terao、Masataka Hoshino、Kenji Takahashi (1.Association of Super-Advanced Electronic Technologies (ASET))

https://doi.org/10.7567/SSDM.2004.F-3-2