The Japan Society of Applied Physics

[F-3-2] Application of High Reliable Silicon Thru-Via to Image Sensor CSP

Kojiro Kameyama, Yoshio Okayama, Mitsuo Umemoto, Akira Suzuki, Hiroshi Terao, Masataka Hoshino, Kenji Takahashi (1.Association of Super-Advanced Electronic Technologies (ASET))

https://doi.org/10.7567/SSDM.2004.F-3-2