On-chip Spiral Inductors Integrated with Wafer-Level Package

Masakazu Sato; Kazuhisa Itoi; Hiroshi Abe; Hirotaka Sugawara; Hiroyuki Ito; Kenichi Okada; Kazuya Masu; Tatsuya Ito

doi:https://doi.org/10.7567/SSDM.2004.F-4-2

[F-4-2] On-chip Spiral Inductors Integrated with Wafer-Level Package

Masakazu Sato、Kazuhisa Itoi、Hiroshi Abe、Hirotaka Sugawara、Hiroyuki Ito、Kenichi Okada、Kazuya Masu、Tatsuya Ito (1.Electron Device Laboratory, Fujikura Ltd.、2.Precision and Intelligence Laboratory, Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.2004.F-4-2

2004 International Conference on Solid State Devices and Materials

[F-4-2] On-chip Spiral Inductors Integrated with Wafer-Level Package