On-chip Spiral Inductors Integrated with Wafer-Level Package

Masakazu Sato; Kazuhisa Itoi; Hiroshi Abe; Hirotaka Sugawara; Hiroyuki Ito; Kenichi Okada; Kazuya Masu; Tatsuya Ito

doi:https://doi.org/10.7567/SSDM.2004.F-4-2

[F-4-2] On-chip Spiral Inductors Integrated with Wafer-Level Package

Masakazu Sato, Kazuhisa Itoi, Hiroshi Abe, Hirotaka Sugawara, Hiroyuki Ito, Kenichi Okada, Kazuya Masu, Tatsuya Ito (1.Electron Device Laboratory, Fujikura Ltd., 2.Precision and Intelligence Laboratory, Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.2004.F-4-2

2004 International Conference on Solid State Devices and Materials

[F-4-2] On-chip Spiral Inductors Integrated with Wafer-Level Package