[F-9-3] Pentacene TFTs Fabricated by High-aspect Ratio Metal Shadow Mask

Sung Hun Jin, Sang Min Yi, Keum Dong Jung, Chang Bum Park, Chong Nam Chu, Hyung Chul Shin, Byung-Gook Park, Jong Duk Lee (1.Inter-university Semiconductor Research Center and School of Electrical Engineering, Seoul National University, 2.School of Mechanical and Aerospace Engineering, Seoul National University)

https://doi.org/10.7567/SSDM.2004.F-9-3