[F-9-3] Pentacene TFTs Fabricated by High-aspect Ratio Metal Shadow Mask

Sung Hun Jin、Sang Min Yi、Keum Dong Jung、Chang Bum Park、Chong Nam Chu、Hyung Chul Shin、Byung-Gook Park、Jong Duk Lee (1.Inter-university Semiconductor Research Center and School of Electrical Engineering, Seoul National University、2.School of Mechanical and Aerospace Engineering, Seoul National University)

https://doi.org/10.7567/SSDM.2004.F-9-3