[H-2-6] Large Threshold Voltage Shift and Narrow Threshold Voltage Distribution in Ultra Thin Body Silicon Nanocrystal Memories

Kosuke Yanagidaira, Masumi Saitoh, Toshiro Hiramaoto (1.Institute of Industial Science, University of Tokyo, 2.Graduate School of Science and Engineering, Chuo University)

https://doi.org/10.7567/SSDM.2004.H-2-6