[H-2-7] Charge-state control of phosphorus donors in SOI MOSFET

Y. Ono, K. Nishiguchi, H. Inokawa, S. Horiguchi, Y. Takahashi (1.NTT Basic Research Laboratories, NTT Corporation)

https://doi.org/10.7567/SSDM.2004.H-2-7