The Japan Society of Applied Physics

[P10-6] Distribution and Impact of Local Trapped Charges in SONOS Memory

Lei Sun, Liyang Pan, Ying Zeng, Huiqing Pang, Jimin Wang, Zhaojian Zhang, Xiyou Li, Jun Zhu (1.Institute of Microelectronics, Tsinghua University)

https://doi.org/10.7567/SSDM.2004.P10-6