[P10-6] Distribution and Impact of Local Trapped Charges in SONOS Memory

Lei Sun、Liyang Pan、Ying Zeng、Huiqing Pang、Jimin Wang、Zhaojian Zhang、Xiyou Li、Jun Zhu (1.Institute of Microelectronics, Tsinghua University)

https://doi.org/10.7567/SSDM.2004.P10-6