[P2-14] Dependence of Analog and Digital Performances on Mechanical Film Stress of ILD Layer in Nano-Scale CMOSFETs

S. H. Park, H. H. Ji, Y. G. Kim, H. D. Lee, S. H Baek, K. C. Kim, B. S. Song, H. K. Bae, H. S. Lee, Y. S. Kang, D. B. Kim, J. W. Park (1.System IC PD Center, Hynix Semiconductor Inc., 2.Dept. of Electronics Engineering, Chungnam National University)

https://doi.org/10.7567/SSDM.2004.P2-14