[P2-15] Damascene Gate CMOSFETs with 30 nm-Scale Gate Length

Sung Hwan Kim, Jeong Dong Choe, Chang Woo Oh, Ming Li, Sang-Yeon Han, Hee Soo Kang, Sung Young Lee, Kyoung Hwan Yeo, Chang Sub Lee, Sung Min Kim, Min Sang Kim, Eun Jung Yoon, Dong Uk Choi, Dong-Won Kim, Donggun Park, Kinam Kim (1.DR and CAE Team, R&D Center, Samsung Electronics Co)

https://doi.org/10.7567/SSDM.2004.P2-15