[P2-15] Damascene Gate CMOSFETs with 30 nm-Scale Gate Length

Sung Hwan Kim、Jeong Dong Choe、Chang Woo Oh、Ming Li、Sang-Yeon Han、Hee Soo Kang、Sung Young Lee、Kyoung Hwan Yeo、Chang Sub Lee、Sung Min Kim、Min Sang Kim、Eun Jung Yoon、Dong Uk Choi、Dong-Won Kim、Donggun Park、Kinam Kim (1.DR and CAE Team, R&D Center, Samsung Electronics Co)

https://doi.org/10.7567/SSDM.2004.P2-15