The Japan Society of Applied Physics

[P2-19] A Novel High Ruggedness Power MOSFET With a Planar Oxide Deep P+ Implant Structure

Feng-Tso Chien, Ming-Hung Lai, Shih-Tzung Su, Ching-Ling Cheng (1.Dept. of Electronic Engineering, Feng Chia University, 2.R&D Dept., Chino-Excel Technology Crop.)

https://doi.org/10.7567/SSDM.2004.P2-19