[P2-8] Impact of Aggressively Shallow Source/Drain Extensions on the Device Performance

Kenji Kimoto, Tetsuya Tada, Toshihiko Kanayama (1.MIRAI-ASET, AIST Tsukuba Central 4, 2.MIRAI-ASRC, AIST Tsukuba, West 7)

https://doi.org/10.7567/SSDM.2004.P2-8