[P3-1] The development of TiN Bottom Electrodes Isolation Methods for the Fabrication of sub-micron DRAM Capacitor

Yong-Tae Cho, Sang-Hoon Cho, Hae-Jung Lee, Suk-Ki Kim, Jong-Bum Park, Jong-Min Lee, Bong-Ho Choi, Jin-Woong Kim (1.HYNIX Semiconductor Inc., Memory R & D Division)

https://doi.org/10.7567/SSDM.2004.P3-1