The Japan Society of Applied Physics

[P5-4] Transient charging and relaxation in high-k gate dielectrics and its implications

Byoung Hun Lee, Chadwin Young, Rino Choi, Jang Hoan Sim, George Brown, Gennadi Bersuker (1.International SEMATECH, 2.IBM)

https://doi.org/10.7567/SSDM.2004.P5-4