[P5-6] Low Temperature Formation of Highly Thermal Immune Ni Germanosilicide Using NiPt Alloy with Co Over-layer in Si1-xGex according to Different Ge Fractions (x)

Jang-Gn Yun, Soon-Young Oh, Bin-Feng Huang, Yong-Jin Kim, Hee-Hwan Ji, Yong-Goo Kim, Yeong-Cheol Kim, Seong-Hyung Park, Heui-Seung Lee, Dae-Byung Kim, Ui-Sik Kim, Han-Seob Cha, Sang-Bum Hu, Jeong-Gun Lee, Hi-Deok Lee (1.Dept. of Electronics Engineering, Chungnam National University, 2.Dept. of Materials Engineering, Korea University of Technology and Education, 3.System IC R&D Division, Hynix Semiconductor Inc.)

https://doi.org/10.7567/SSDM.2004.P5-6