[P5-8] Electrical Characterization of Strained Si/SiGe Wafers using Transient Capacitance Measurements

Dong Wang、Masaharu Ninomiya、Masahiko Nakamae、Hiroshi Nakashima (1.Art, Science and Technology Center for Cooperative Research, Kyushu University、2.Sumitomo Mitsubishi Silicon Corporation)

https://doi.org/10.7567/SSDM.2004.P5-8