[P5-8] Electrical Characterization of Strained Si/SiGe Wafers using Transient Capacitance Measurements
Dong Wang, Masaharu Ninomiya, Masahiko Nakamae, Hiroshi Nakashima
(1.Art, Science and Technology Center for Cooperative Research, Kyushu University, 2.Sumitomo Mitsubishi Silicon Corporation)
https://doi.org/10.7567/SSDM.2004.P5-8
