[P8-6] Strain-Relief Mechanisms of Stepwise Ge composition Multilayer Buffers and High PVCR Si/Si1-xGex ASDQW RTD Formed with Triple-Layer Buffer

Hirotaka Maekawa、Yoshihiro Sano、Yoshiyuki Suda (1.Faculty of Technology, Tokyo University of Agriculture and Technology)

https://doi.org/10.7567/SSDM.2004.P8-6