[A-6-2] Design Methodology for La2O3-Based Ternally Higher-κ Dielectrics

Koji Kita, Yi Zhao, Yoshiki Yamamot, Kentaro Kyuno, Akira Toriumi (1.Department of Materials Engineering, School of Engineering, The University of Tokyo)

https://doi.org/10.7567/SSDM.2005.A-6-2