[A-8-1] MoXSiYNZ Metal Gate Electrode with Tunable Work Function for Advanced CMOS

P. Zhao, J. Kim, M. J. Kim, B. E. Gnade, R. M. Wallace (1.Dept. of Electrical Engineering, University of Texas at Dallas, 2.School of Advanced Materials Eng., Kookmin University)

https://doi.org/10.7567/SSDM.2005.A-8-1