[A-8-2] Ta-based metal gates (Ta, TaBx, TaNx and TaCx) -Modulated Work Function and Improved Thermal Stability-

Reika Ichihara, Yoshinori Tsuchiya, Yuuichi Kamimuta, Masato Koyama, Akira Nishiyama (1.Advanced LSI Technology Laboratory, Toshiba Corp.)

https://doi.org/10.7567/SSDM.2005.A-8-2